Editorial for the Special Issue on State-of-the-Art CMOS and MEMS Devices
Complementary Metal Oxide Semiconductor (CMOS) and Micro-Electro-Mechanical System (MEMS) devices play significant roles in emerging research fields such as artificial intelligence (AI) [...].
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Veröffentlicht in: | Micromachines (Basel) 2024-02, Vol.15 (3), p.327 |
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Format: | Artikel |
Sprache: | eng |
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Online-Zugang: | Volltext |
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Zusammenfassung: | Complementary Metal Oxide Semiconductor (CMOS) and Micro-Electro-Mechanical System (MEMS) devices play significant roles in emerging research fields such as artificial intelligence (AI) [...]. |
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ISSN: | 2072-666X 2072-666X |
DOI: | 10.3390/mi15030327 |