The Performance Characterization and Optimization of Fiber-Optic Acoustic Pressure Sensors Based on the MOEMS Sensitized Structure

In order to investigate the factors affecting the acoustic performance of the extrinsic Fabry–Perot interferometer (EFPI) fiber-optic acoustic pressure sensor and to effectively improve its detection capability, this paper enhances the sensor’s detection sensitivity by adding more sensitized rings t...

Ausführliche Beschreibung

Gespeichert in:
Bibliographische Detailangaben
Veröffentlicht in:Sensors (Basel, Switzerland) Switzerland), 2023-10, Vol.23 (19), p.8300
Hauptverfasser: Zhou, Ruling, Guan, Chenggang, Lv, Hui, Li, Shasha, Lv, Puchu, Qin, Haixin, Chu, Wenxiu, Zhou, Yikai, Zhang, Yihao, Li, Xiaoqiang
Format: Artikel
Sprache:eng
Schlagworte:
Online-Zugang:Volltext
Tags: Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!
Beschreibung
Zusammenfassung:In order to investigate the factors affecting the acoustic performance of the extrinsic Fabry–Perot interferometer (EFPI) fiber-optic acoustic pressure sensor and to effectively improve its detection capability, this paper enhances the sensor’s detection sensitivity by adding more sensitized rings to its acoustic pressure-sensitive film. Furthermore, a novel real-time coupled acoustic test method is proposed to simultaneously monitor the changes in the spectral and acoustic metrics of the sensor to characterize its overall performance. Finally, an EFPI-type fiber-optic acoustic pressure sensor was developed based on the Micro-Optical Electro-Mechanical System (MOEMS). The acoustic tests indicate that the optimized fiber-optic acoustic pressure sensor has a sensitivity as high as 2253.2 mV/Pa, and the acoustic overload point (AOP) and signal-to-noise ratios (SNRs) can reach 108.85 dB SPL and 79.22 dB, respectively. These results show that the sensor produced through performance characterization experiments and subsequent optimization has a very high acoustic performance index, which provides a scientific theoretical basis for improving the overall performance of the sensor and will have broad application prospects in the field of acoustic detection.
ISSN:1424-8220
1424-8220
DOI:10.3390/s23198300