Analysis of photoelastic properties of monocrystalline silicon
Photoelasticity is considered a useful measurement tool for the non-destructive and contactless determination of mechanical stresses or strains in the production of silicon wafers. It describes a change in the indices of refraction of a material when the material is mechanically loaded. As silicon h...
Gespeichert in:
Veröffentlicht in: | Journal of sensors and sensor systems 2020-07, Vol.9 (2), p.209-217 |
---|---|
Hauptverfasser: | , , , |
Format: | Artikel |
Sprache: | eng |
Schlagworte: | |
Online-Zugang: | Volltext |
Tags: |
Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!
|
Zusammenfassung: | Photoelasticity is considered a useful measurement tool for the non-destructive and contactless determination of mechanical stresses or strains in the production of silicon wafers. It describes a change in the indices of refraction of a material when the material is mechanically loaded. As silicon has a diamond lattice structure, the stress-dependent change in the refractive indices varies with the loading direction. In this work, an anisotropic stress-optic law is derived, and the corresponding stress-optical parameters are measured using a Brazilian disc test. The parameters were determined to be (π11-π12)=14.4⋅10-7 MPa−1 and π44=9.4⋅10-7 MPa−1. The results of this work are compared to previous works found in the literature, and the deviations are discussed. |
---|---|
ISSN: | 2194-878X 2194-8771 2194-878X |
DOI: | 10.5194/jsss-9-209-2020 |