MAGNETOOPTICAL CONTROL OF SPATIAL MAGNETIC FIELD DISTRIBUTION IN MICROELECTROMECHANICAL SYSTEMS

A study is performed of the spatial distribution of magnetic field of a microelectromechanical systems (MEMS) with the aid of magneto-optical indicator ferrite garnet films (MOIF). In order to increase the accuracy and the dynamic range of measure a procedure was developed including the use of auxiliary external field resulting in a controlled shift of the zero-field lines. In this case the MOIF serves as a null-indicator eliminating the dependence of the measuring results on the specific transfer parameters (linearity characteristics). Imposition of biasing field provides a possibility of shifting the saturation threshold field of the MOIF either in the region of positive or negative values.