An Optimized Adsorbent Sampling Combined to Thermal Desorption GC-MS Method for Trimethylsilanol in Industrial Environments

An Optimized Adsorbent Sampling Combined to Thermal Desorption GC-MS Method for Trimethylsilanol in Industrial Environments

Trimethylsilanol (TMSOH) can cause damage to surfaces of scanner lenses in the semiconductor industry, and there is a critical need to measure and control airborne TMSOH concentrations. This study develops a thermal desorption (TD)-gas chromatography (GC)-mass spectrometry (MS) method for measuring...

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Veröffentlicht in:International Journal of Analytical Chemistry 2012-01, Vol.2012 (2012), p.184-193
Hauptverfasser: Lee, Jae Hwan, Jia, Chunrong, Kim, Yong Doo, Kim, Hong Hyun, Pham, Tien Thang, Choi, Young Seok, Seo, Young Un, Lee, Ike Woo
Format: Artikel
Sprache:eng
Schlagworte:
Analytical chemistry
Chemical industry
Chemical properties
Chromatography
Composition
Factories
Gas chromatography
Identification and classification
Manufacturing
Mass spectrometry
Methods
Methyl groups
Scanners
Semiconductors
Studies
Thermal desorption
Thermal properties
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Zusammenfassung:Trimethylsilanol (TMSOH) can cause damage to surfaces of scanner lenses in the semiconductor industry, and there is a critical need to measure and control airborne TMSOH concentrations. This study develops a thermal desorption (TD)-gas chromatography (GC)-mass spectrometry (MS) method for measuring trace-level TMSOH in occupational indoor air. Laboratory method optimization obtained best performance when using dual-bed tube configuration (100 mg of Tenax TA followed by 100 mg of Carboxen 569), n-decane as a solvent, and a TD temperature of 300°C. The optimized method demonstrated high recovery (87%), satisfactory precision (
ISSN:1687-8760
1687-8779
DOI:10.1155/2012/690356