AFM RESEARCH OF MORPHOLOGY OF SURFACE LAYER SAPPHIRE AFTER PLASMA SURFACE TREATMENT

AFM RESEARCH OF MORPHOLOGY OF SURFACE LAYER SAPPHIRE AFTER PLASMA SURFACE TREATMENT

An AFM study of the sapphire surface after plasma treatment was carried out. The AFM images of the sapphire surface in the initial state and after plasma treatment are obtained. It is established that after plasma treatment the arithmetic mean deviation of the surface profile increases and the surfa...

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Veröffentlicht in:Fiziko-himičeskie aspekty izučeniâ klasterov, nanostruktur i nanomaterialov (Online) nanostruktur i nanomaterialov (Online), 2017-12 (9), p.337-340
Hauptverfasser: Nagaplezheva, R.R., Orakova, M.M., Luev, V.K.
Format: Artikel
Sprache:eng ; rus
Schlagworte:
atomic force microscopy
plasma
sapphire
scanning probe microscopy
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Zusammenfassung:An AFM study of the sapphire surface after plasma treatment was carried out. The AFM images of the sapphire surface in the initial state and after plasma treatment are obtained. It is established that after plasma treatment the arithmetic mean deviation of the surface profile increases and the surface becomes more homogeneous.
ISSN:2226-4442
2658-4360
DOI:10.26456/pcascnn/2017.9.337