Optical properties of SrxBa1−xNb2O6 nanoscale films (x = 0.5 and 0.61) grown by RF-cathode sputtering in an oxygen atmosphere

The research findings of the phase composition, nanostructure and optical properties of strontium–barium niobate thin films are discussed. Sr x Ba 1 − x Nb2O6 nanosized films ( x = 0.5 and 0.61) were characterized by XRD, SEM and AFM studies. Reflective multi-angle ellipsometry and spectrophotometry...

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Veröffentlicht in:Journal of advanced dielectrics 2021-10, Vol.11 (5), p.2160014-1-2160014-6
Hauptverfasser: Kara-Murza, S. V., Zhidel, K. M., Korchikova, N. V., Tekhtelev, Yu. V., Pavlenko, A. V., Kiseleva, L. I.
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Sprache:eng
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Zusammenfassung:The research findings of the phase composition, nanostructure and optical properties of strontium–barium niobate thin films are discussed. Sr x Ba 1 − x Nb2O6 nanosized films ( x = 0.5 and 0.61) were characterized by XRD, SEM and AFM studies. Reflective multi-angle ellipsometry and spectrophotometry were used to determine the optical parameters (refractive index, its dispersion, and thickness of the damaged surface layer) of thin films. It was shown that SBN-50 and SBN-61 thin films were grown c -oriented on Al2O3 (0001) and heteroepitaxial on MgO (001) substrates. The increase of refractive index, approaching its maximum value in the bulk material for a given composition as the film thickness increases, is observed.
ISSN:2010-135X
2010-1368
DOI:10.1142/S2010135X21600146