Application of a Modified First-Order Plate Theory to Structural Analysis of Sensitive Elements in a Pyroelectric Detector

Pyroelectric materials, with piezoelectricity and pyroelectricity, have been widely used in infrared thermal detectors. In this paper, a modified first-order plate theory is extended to analyze a pyroelectric sensitive element structure. The displacement, temperature, and electric potential expand a...

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Veröffentlicht in:Micromachines (Basel) 2024-08, Vol.15 (8), p.1012
Hauptverfasser: Lian, Mengmeng, Fan, Cuiying, Zhan, Xiaohan, Zhao, Minghao, Qin, Guoshuai, Lu, Chunsheng
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Sprache:eng
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Zusammenfassung:Pyroelectric materials, with piezoelectricity and pyroelectricity, have been widely used in infrared thermal detectors. In this paper, a modified first-order plate theory is extended to analyze a pyroelectric sensitive element structure. The displacement, temperature, and electric potential expand along the thickness direction. The governing equation of the pyroelectric plate is built up. The potential distributions with upper and lower electrodes are obtained under different supported boundary conditions. The corresponding numerical results of electric potential are consistent with those obtained by the three-dimensional finite element method. Meanwhile, the theoretical results of electric potential are close to that of experiments. The influence of supported boundary conditions, piezoelectric effect, and plate thickness are analyzed. Numerical results show that the piezoelectric effect reduces the electric potential. The thickness of the pyroelectric plate enhances the electric potential but reduces the response speed of the detector. It is anticipated that the pyroelectric plate theory can provide a theoretical approach for the structural design of pyroelectric sensitive elements.
ISSN:2072-666X
2072-666X
DOI:10.3390/mi15081012