Design of a Template-Based Electrophoretically Assisted Micro-Ultrasonic Machining Micro-Channel Machine Tool and Its Machining Experiment

In order to achieve the high-precision and high-efficiency machining of micro-channels for hard and brittle materials, the authors innovatively proposed a new technology called template-based electrophoretically assisted micro-ultrasonic machining (TBEPAMUSM). This technology transfers the micro-channel shape punch-pin to the workpiece material through micro-ultrasonic machining to form a micro-channel. At the same time, it uses the electrophoretic properties of ultra-fine abrasive particles to ensure the existence of abrasive particles in the machining area by applying a DC electric field. According to the new technology machining principle, a machine tool of TBEPAMUSM was designed and developed. The machine tool hardware adopts a C-shaped structure, including a marble platform, an ultrasonic vibration system, a micro three-dimensional motion platform, a working fluid tank, and a pressure sensor. The machine tool intelligent control system is developed based on LabVIEW, including the initialization module, fast positioning module, constant force tool setting module, constant force control machining module, and real-time coordinate display module. Micro-channels with different structures are machined on single-crystal silicon and soda-lime glass using the designed machine tool and the developed control system. The results show that: when electrophoresis assistance is applied in machining, the edge chipping phenomenon of the micro-channel is significantly reduced, the surface roughness is reduced by about 20%, and the machining efficiency is increased by about 4%.