Temperature Effects on the Propagation Characteristics of Love Waves along Multi-Guide Layers of Sio sub>2 /sub>/Su-8 on St-90°X Quartz

Temperature Effects on the Propagation Characteristics of Love Waves along Multi-Guide Layers of Sio sub>2 /sub>/Su-8 on St-90°X Quartz

Theoretical calculations have been performed on the temperature effects on the propagation characteristics of Love waves in layered structures by solving the coupled electromechanical field equations, and the optimal design parameters were extracted for temperature stability improvement. Based on th...

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Veröffentlicht in:Sensors (Basel, Switzerland) Switzerland), 2012-05, Vol.12 (6), p.7337-7349
Hauptverfasser: Fangqian Xu, Wen Wang, Jiaoli Hou, Minghua Liu
Format: Artikel
Sprache:eng
Schlagworte:
Love wave
multi-guide
SiO 2
ST-90°X quartz
SU-8
Tcf
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Zusammenfassung:Theoretical calculations have been performed on the temperature effects on the propagation characteristics of Love waves in layered structures by solving the coupled electromechanical field equations, and the optimal design parameters were extracted for temperature stability improvement. Based on the theoretical analysis, excellent temperature coefficient of frequency ( Tcf ) of the fabricated Love wave devices with guide layers of SU-8/SiO 2 on ST-90°X quartz substrate is evaluated experimentally as only 2.16 ppm.
ISSN:1424-8220
1424-8220
DOI:10.3390/s120607337