Single mode and polarization independence in the strained silicon-on-insulator rib waveguides

In this paper we investigate the most popular silicon waveguide structures in the form of a silicon-on-insulator (SOI) rib waveguide. Single mode and birefringence free conditions in these relatively small waveguides are discussed and the influence of the top oxide cladding stress is analyzed. Field...

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Veröffentlicht in:Hemijska industrija 2008-01, Vol.62 (3), p.119-124
Hauptverfasser: Milosevic, Milan, Matavulj, Petar, Mashanovich, Goran
Format: Artikel
Sprache:eng ; srp
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Zusammenfassung:In this paper we investigate the most popular silicon waveguide structures in the form of a silicon-on-insulator (SOI) rib waveguide. Single mode and birefringence free conditions in these relatively small waveguides are discussed and the influence of the top oxide cladding stress is analyzed. Field profiles for a wide range of waveguide cross section shapes and dimensions are systematically considered. Design guidelines for this type of SOI waveguides are presented. U ovom radu su prezentovane strukture trenutno vrlo popularnih silicijumskih rib talasovoda. Proucavan je uslov jednomodnog prostiranja i postizanja nultog dvojnog prelamanja sa razmatranjem uticaja naprezanja usled nanosenja tankog sloja oksida na jezgro talasovoda. Sistematicno su analizirani profili polja za siroki spektar dimenzija i poprecnih preseka talasovoda, i prikazana su odgovarajuca pravila dizajna ovakvih struktura.
ISSN:0367-598X
2217-7426
DOI:10.2298/HEMIND0803119M