Scattering of e± from CF3I Molecule

Theoretical investigation of the scattering of electrons and positrons from the plasma etching gas trifluoroiodomethane (CF3I) is presented in the present work. The investigation is carried out by taking into account the screening correction arising from a semiclassical analysis of atomic geometrical overlapping of the scattering cross-sections calculated in the independent atom approximation. The scattering system e±-CF3I is studied through the calculations of the observable quantities, namely, absolute differential, Sherman function, total elastic and inelastic, momentum transfer, viscosity, ionization and total cross sections over the energy range 1 eV–1 MeV. Energy dependency of the differential cross section and Sherman function are also picturized in this work. A comparative study is carried out between scattering observables for electron impact with those for positron impact to get a better understanding of the interaction and dynamics of the collision process. The corresponding scattering quantities of the constituent atoms are calculated employing a complex optical model potential by solving the Dirac relativistic wave equations in the framework of partial wave analysis. The comparison of our results with the available experimental and theoretical data shows a reasonable agreement.