Micro Hole Processing Using Electro-Chemical Discharge Machining

Recently, micro holes processing on glass were focused on chemical and biological filed. Authors focused on Electro-Chemical Discharge Machining (ECDM) to machine micro holes on glass, and developed the ECDM device. This paper reports about feedback circuit for machining-stop system and two-step mac...

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Veröffentlicht in:Journal of Advanced Mechanical Design, Systems, and Manufacturing Systems, and Manufacturing, 2012, Vol.6(6), pp.949-957
Hauptverfasser: MOCHIMARU, Yasuhiro, OTA, Minoru, YAMAGUCHI, Keishi
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Sprache:eng
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Zusammenfassung:Recently, micro holes processing on glass were focused on chemical and biological filed. Authors focused on Electro-Chemical Discharge Machining (ECDM) to machine micro holes on glass, and developed the ECDM device. This paper reports about feedback circuit for machining-stop system and two-step machining which were developed to reduce the smallest diameter of micro hole. Additionally, the tool electrode of which diameter was 20 µm was produced using Electro-Chemical Machining (ECM). As a result, the diameter of micro hole was reached to 12 µm.
ISSN:1881-3054
1881-3054
DOI:10.1299/jamdsm.6.949