Fabrication of Crystalline Microresonators of High Quality Factors with a Controllable Wedge Angle on Lithium Niobate on Insulator

Fabrication of Crystalline Microresonators of High Quality Factors with a Controllable Wedge Angle on Lithium Niobate on Insulator

We report the fabrication of crystalline microresonators of high quality (Q) factors with a controllable wedge angle on lithium niobate on insulator (LNOI). Our technique relies on a femtosecond laser assisted chemo-mechanical polish, which allows us to achieve ultrahigh surface smoothness as critic...

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Veröffentlicht in:Nanomaterials (Basel, Switzerland) Switzerland), 2019-08, Vol.9 (9), p.1218
Hauptverfasser: Zhang, Jianhao, Fang, Zhiwei, Lin, Jintian, Zhou, Junxia, Wang, Min, Wu, Rongbo, Gao, Renhong, Cheng, Ya
Format: Artikel
Sprache:eng
Schlagworte:
chemo-mechanical polish
controllable wedge angle
Crystal structure
Crystallinity
Fabrication
high quality factors
Laboratories
Lasers
Lithium
lithium niobate microdisk resonator
Lithium niobates
Materials science
Morphology
Optics
Particle size
Photonics
Q factors
Semiconductors
Smoothness
Thin films
Wedges
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Zusammenfassung:We report the fabrication of crystalline microresonators of high quality (Q) factors with a controllable wedge angle on lithium niobate on insulator (LNOI). Our technique relies on a femtosecond laser assisted chemo-mechanical polish, which allows us to achieve ultrahigh surface smoothness as critically demanded by high Q microresonator applications. We show that by refining the polish parameters, Q factors as high as 4.7 × 10 can be obtained and the wedge angle of the LNOI can be continuously tuned from 9° to 51°.
ISSN:2079-4991
2079-4991
DOI:10.3390/nano9091218