Precision Optical Metrology and Smart Sensing

Optics, renowned for its non-contact measurement capabilities, versatility, and high sensitivity, is recognized as a powerful tool driving the technological evolution of precision metrology [...].

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Bibliographische Detailangaben
Veröffentlicht in:	Sensors (Basel, Switzerland) Switzerland), 2024-10, Vol.24 (21), p.6816
Hauptverfasser:	Zhang, Xiangchao, Wang, Jian, Wang, Yajun
Format:	Artikel
Sprache:	eng
Schlagworte:	Accuracy Algorithms Artificial intelligence Automation Deformation Design specifications Environmental monitoring Instrument industry Integrated circuit fabrication Measurement techniques n/a Optimization Science Semiconductor industry Signal processing Technology application Topography
Online-Zugang:	Volltext
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Beschreibung
Zusammenfassung:	Optics, renowned for its non-contact measurement capabilities, versatility, and high sensitivity, is recognized as a powerful tool driving the technological evolution of precision metrology [...].
ISSN:	1424-8220 1424-8220
DOI:	10.3390/s24216816