FORMATION FEATURES AND PROPERTIES OF TITANIUM DIOXIDE FILMS
The study results of titanium dioxide thin film coatings formulated by various methods: by long oxidation of titanium metal films in the air, anodizing, pulsed thermal oxidation, sol-gel method are given. The optimal modes of formation are determined, barrier properties are compared, gas sensing cha...
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| Veröffentlicht in: | Doklady Belorusskogo gosudarstvennogo universiteta informatiki i radioèlektroniki 2019-06 (8), p.93-98 |
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| Hauptverfasser: | , |
| Format: | Artikel |
| Sprache: | rus |
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| Online-Zugang: | Volltext |
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| Zusammenfassung: | The study results of titanium dioxide thin film coatings formulated by various methods: by long oxidation of titanium metal films in the air, anodizing, pulsed thermal oxidation, sol-gel method are given. The optimal modes of formation are determined, barrier properties are compared, gas sensing characteristics of doped titanium dioxide films are studied. |
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| ISSN: | 1729-7648 |