Enhanced Tunability of BaTixSn1−xO3 Films on Dielectric Substrate

The structural properties of ferroelectric films of barium titanate-stannate on alumina substrates and the microwave characteristics of planar capacitive elements based on them are studied. It is established that the composition of the gas medium and the temperature of the substrate during the depos...

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Veröffentlicht in:	Applied sciences 2021-08, Vol.11 (16), p.7367
Hauptverfasser:	Tumarkin, Andrey, Sapego, Evgeny, Gagarin, Alexander, Senkevich, Stanislav
Format:	Artikel
Sprache:	eng
Schlagworte:	Aluminum Aluminum oxide Barium barium titanate-stannate Barium titanates Crystal lattices Crystal structure Deposition Dielectric properties Electric fields electrical tunable dielectric Ferroelectrics High temperature microwave properties Phase composition Q-factor Solid solutions Substrates Thin films XRD
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Zusammenfassung:	The structural properties of ferroelectric films of barium titanate-stannate on alumina substrates and the microwave characteristics of planar capacitive elements based on them are studied. It is established that the composition of the gas medium and the temperature of the substrate during the deposition of the film has a significant effect on the crystal structure, phase composition of the films and their electrical characteristics. Planar capacitors based on films subjected to high-temperature annealing after deposition exhibit 85% tunability at a frequency of 2 GHz, which is the best result for today.
ISSN:	2076-3417 2076-3417
DOI:	10.3390/app11167367