Optimization of the electrostatic structure of the ion microprobe

Optimization of the electrostatic structure of the ion microprobe

The paper presents optimization data obtained for an immersion probe-forming system of the ion microprobe to be used in 3 MeV H+ ion accelerator generating 0,4 μm beam spot for normalized acceptance of 7 μm2 · mrad2 · MeV. To achieve higher microprobe resolution it is intended to place an electrosta...

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Veröffentlicht in:I͡A︡derna fizyka ta enerhetyka 2012-03, Vol.13 (1), p.97-100
Hauptverfasser: I. G. Ignat'ev, V. I. Miroshnychenko, O. G. Ponomarev, V. Yu. Storizhko
Format: Artikel
Sprache:eng
Schlagworte:
ion beam
immersion probe-forming system
optimizations
electrostatic accelerator
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Zusammenfassung:The paper presents optimization data obtained for an immersion probe-forming system of the ion microprobe to be used in 3 MeV H+ ion accelerator generating 0,4 μm beam spot for normalized acceptance of 7 μm2 · mrad2 · MeV. To achieve higher microprobe resolution it is intended to place an electrostatic lens between the collimators and the accelerating tube.
ISSN:1818-331X
2074-0565