Mass Sensitivity Evaluation of Surface Acoustic Wave Biosensor

Mass Sensitivity Evaluation of Surface Acoustic Wave Biosensor

In this paper, the mass sensitivity of a 3-Dimensional SiO 2 /36°YX LiTaO 3 Love mode SAW biosensor is investigated by a novel approach. The normalized displacement confirms the shear horizontal nature of Love wave. The phase mass sensitivity of 76.4931 m 2 /kg is obtained by evaluating the phase sh...

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Veröffentlicht in:E3S web of conferences 2021-01, Vol.259, p.4003
Hauptverfasser: Chen, Chen, Xie, Yuntao
Format: Artikel
Sprache:eng
Schlagworte:
Biosensors
Impulse response
Insertion
Insertion loss
Love waves
Sensitivity analysis
Silicon dioxide
Surface acoustic wave devices
Viruses
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Zusammenfassung:In this paper, the mass sensitivity of a 3-Dimensional SiO 2 /36°YX LiTaO 3 Love mode SAW biosensor is investigated by a novel approach. The normalized displacement confirms the shear horizontal nature of Love wave. The phase mass sensitivity of 76.4931 m 2 /kg is obtained by evaluating the phase shifts. The insertion loss of -17.2dB is achieved by impulse response analysis. This Love mode SAW biosensor has potential applications in detecting viruses, cancer markers, bacteria, etc.
ISSN:2267-1242
2555-0403
2267-1242
DOI:10.1051/e3sconf/202125904003