Long Electrical Stability on Dual Acceptor p-Type ZnO:Ag,N Thin Films
p-type Ag-N dual acceptor doped ZnO thin films with long electrical stability were deposited by DC magnetron reactive co-sputtering technique. After deposition, the films were annealed at 400 °C for one hour in a nitrogen-controlled atmosphere. The deposited films were amorphous. However, after anne...
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Veröffentlicht in: | Micromachines (Basel) 2024-06, Vol.15 (6), p.800 |
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Format: | Artikel |
Sprache: | eng |
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Zusammenfassung: | p-type Ag-N dual acceptor doped ZnO thin films with long electrical stability were deposited by DC magnetron reactive co-sputtering technique. After deposition, the films were annealed at 400 °C for one hour in a nitrogen-controlled atmosphere. The deposited films were amorphous. However, after annealing, they crystallize in the typical hexagonal wurtzite structure of ZnO. The Ag-N dual acceptors were incorporated substitutionally in the structure of zinc oxide, and achieving that; the three samples presented the p-type conductivity in the ZnO. Initial electrical properties showed a low resistivity of from 1 to 10
Ω·cm, Hall mobility of tens cm
/V·s, and a hole concentration from 10
to 10
cm
. The electrical stability analysis reveals that the p-type conductivity of the ZnO:Ag,N films is very stable and does not revert to n-type, even after 36 months of aging. These results reveal the feasibility of using these films for applications in short-wavelength or transparent optoelectronic devices. |
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ISSN: | 2072-666X 2072-666X |
DOI: | 10.3390/mi15060800 |