A Room Temperature ZnO-NPs/MEMS Ammonia Gas Sensor

A Room Temperature ZnO-NPs/MEMS Ammonia Gas Sensor

This study uses ultrasonic grinding to grind ZnO powder to 10−20-nanometer nanoparticles (NPs), and these are integrated with a MEMS structure to form a ZnO-NPs/MEMS gas sensor. Measuring 1 ppm NH3 gas and operating at room temperature, the sensor response for the ZnO-NPs/MEMS gas sensor is around 3...

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Veröffentlicht in:Nanomaterials (Basel, Switzerland) Switzerland), 2022-09, Vol.12 (19), p.3287
Hauptverfasser: Hsueh, Ting-Jen, Ding, Ruei-Yan
Format: Artikel
Sprache:eng
Schlagworte:
Ammonia
Analysis
Carbon dioxide
Electrodes
gas sensor
Gas sensors
Gases
Methods
Microelectromechanical systems
Morphology
Nanoparticles
Outdoor air quality
Properties
Room temperature
Scanning electron microscopy
Selectivity
Sensors
Silicon nitride
Structure
Sulfur dioxide
Surface defects
Zinc oxide
Zinc oxides
ZnO
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Zusammenfassung:This study uses ultrasonic grinding to grind ZnO powder to 10−20-nanometer nanoparticles (NPs), and these are integrated with a MEMS structure to form a ZnO-NPs/MEMS gas sensor. Measuring 1 ppm NH3 gas and operating at room temperature, the sensor response for the ZnO-NPs/MEMS gas sensor is around 39.7%, but the origin-ZnO powder/MEMS gas sensor is fairly unresponsive. For seven consecutive cycles, the ZnO-NPs/MEMS gas sensor has an average sensor response of about 40% and an inaccuracy of
ISSN:2079-4991
2079-4991
DOI:10.3390/nano12193287