Current tuned slotted Y‐branch laser for wafer thickness measurements with THz radiation

A slotted Y‐branch laser diode that emits two spectral modes at a difference frequency of about 1 THz is investigated in the context of photonic based cw‐THz measurements. The beating frequency of the emitted laser light can be tuned by ±10.5 GHz around 1 THz by changing the applied laser current, w...

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Veröffentlicht in:Electronics Letters 2021-11, Vol.57 (24), p.936-938
Hauptverfasser: Surkamp, N., Gerling, A., O'Gorman, J., Honsberg, M., Schmidtmann, S., Nandi, U., Preu, S., Sacher, J., Brenner, C., Hofmann, M. R.
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Sprache:eng
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Zusammenfassung:A slotted Y‐branch laser diode that emits two spectral modes at a difference frequency of about 1 THz is investigated in the context of photonic based cw‐THz measurements. The beating frequency of the emitted laser light can be tuned by ±10.5 GHz around 1 THz by changing the applied laser current, which allows for potentially fast measurements. A second spectral window of ±6.5 GHz was found at 850 GHz. Pointwise scanning of the difference frequency is demonstrated with thickness determination of HRFZ‐Si wafer samples as a possible application scenario.
ISSN:0013-5194
1350-911X
DOI:10.1049/ell2.12314