Kilohertz Pixel-Rate Multilayer Terahertz Imaging of Subwavelength Coatings

The acquisition speed of terahertz time-domain spectroscopy systems has undergone a significant improvement in recent years. With the development of dual-laser-based sampling techniques such as ASOPS or ECOPS, waveform acquisition rates in the kilohertz range have become feasible. Here, we present m...

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Veröffentlicht in:Applied sciences 2022-05, Vol.12 (10), p.4964
Hauptverfasser: Molter, Daniel, Ellenberger, Kim-Sophie, Klier, Jens, Duran, Stefan, Jonuscheit, Joachim, von Freymann, Georg, Vieweg, Nico, Deninger, Anselm
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Sprache:eng
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Zusammenfassung:The acquisition speed of terahertz time-domain spectroscopy systems has undergone a significant improvement in recent years. With the development of dual-laser-based sampling techniques such as ASOPS or ECOPS, waveform acquisition rates in the kilohertz range have become feasible. Here, we present measurements of sub-wavelength layers in multilayer systems at a rate of 1.6 kHz, where the individual layer thicknesses are analyzed in real time. For demonstration, we image layers on metallic and non-metallic disks with a 300 mm diameter, acquiring 240,000 pixels in only 2.5 min. By combining a rotation of the samples with a linear translation of the measurement head, we maximize the measurement yield. Owing to a “single-shot” (625 µs) dynamic range of 40 dB and a bandwidth above 3 THz of the ECOPS system, we achieve sub-micron repeatability for each layer.
ISSN:2076-3417
2076-3417
DOI:10.3390/app12104964