Coherent Fourier scatterometry for particle detection on structured surfaces

We demonstrate the detection of particles/contamination present on a structured surface using Coherent Fourier scatterometry (CFS) by applying Fourier filtering to the scanned maps, which eliminates background effects due to the electronic noise as well the structure itself. We show that by using fi...

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Veröffentlicht in:EPJ Web of conferences 2022, Vol.266, p.10014
Hauptverfasser: Paul, Anubhav, Kolenov, Dmytro, Pereira, Silvania F.
Format: Artikel
Sprache:eng
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Zusammenfassung:We demonstrate the detection of particles/contamination present on a structured surface using Coherent Fourier scatterometry (CFS) by applying Fourier filtering to the scanned maps, which eliminates background effects due to the electronic noise as well the structure itself. We show that by using filters in the Fourier space we can significantly improve the detection capabilities of the particles present on the structure.
ISSN:2100-014X
2100-014X
DOI:10.1051/epjconf/202226610014