Influence of Obtainment Conditions and Excitation Into Spectral and Kinetic Characteristics of Cathodoluminescence in Y2O3:Eu Thin Films

The spectra and kinetics of the rise and decay of the cathodoluminescence (CL) of thin films of Y2O3:Eu obtained by RF-magnetron sputtering were investigated. Based on the shape of the CL spectra at different excitation energies, it showed the possibility of creating irregular solutions of yttrium and europium oxides and the structural features of the surface and bulk layers. The time constant for the decay CL for 612 nm emission was determined and the value of which is within the range (1.8 - 4.1) ms. This value is a complex function of the type of film deposition atmosphere, the activator concentration, and the duration of the exciting pulses was shown. The features of the risen CL and the proposal based on the delayed rise CL analyze structural perfection of Y2O3:Eu thin films.