Subsurface disorder and electro-optical properties of proton-exchanged LiNbO3 waveguides produced by different techniques

It has been established, that proton-exchanged LiNbO3 waveguides have a marked subsurface layer with structural disorder inducing degradation of electro-optical properties of these waveguides. At the same time, such a subsurface disorder is found to be less pronounced in soft proton-exchanged (SPE)...

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Veröffentlicht in:Journal of the European Optical Society. Rapid publications 2014, Vol.9, p.14055
Hauptverfasser: Kostritskii, S. M., Korkishko, Y. N., Fedorov, V. A., Mitrokhin, V. P., Sevostyanov, O. G., Chirkova, I. M., Stepanenko, O., De Micheli, M.
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Sprache:eng
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Zusammenfassung:It has been established, that proton-exchanged LiNbO3 waveguides have a marked subsurface layer with structural disorder inducing degradation of electro-optical properties of these waveguides. At the same time, such a subsurface disorder is found to be less pronounced in soft proton-exchanged (SPE) waveguides in comparison with annealed proton-exchanged (APE) ones. The experimental samples of phase modulators fabricated by SPE technique exhibit a better electro-optical efficiency compared to the LiNbO3 modulators produced by the standard and improved APE techniques.
ISSN:1990-2573
1990-2573
DOI:10.2971/jeos.2014.14055