Subsurface disorder and electro-optical properties of proton-exchanged LiNbO3 waveguides produced by different techniques
It has been established, that proton-exchanged LiNbO3 waveguides have a marked subsurface layer with structural disorder inducing degradation of electro-optical properties of these waveguides. At the same time, such a subsurface disorder is found to be less pronounced in soft proton-exchanged (SPE)...
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Veröffentlicht in: | Journal of the European Optical Society. Rapid publications 2014, Vol.9, p.14055 |
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Hauptverfasser: | , , , , , , , |
Format: | Artikel |
Sprache: | eng |
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Online-Zugang: | Volltext |
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Zusammenfassung: | It has been established, that proton-exchanged LiNbO3 waveguides have a marked subsurface layer with structural disorder inducing degradation of electro-optical properties of these waveguides. At the same time, such a subsurface disorder is found to be less pronounced in soft proton-exchanged (SPE) waveguides in comparison with annealed proton-exchanged (APE) ones. The experimental samples of phase modulators fabricated by SPE technique exhibit a better electro-optical efficiency compared to the LiNbO3 modulators produced by the standard and improved APE techniques. |
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ISSN: | 1990-2573 1990-2573 |
DOI: | 10.2971/jeos.2014.14055 |