Wavelength calibration using MEMS-enabled double filter configuration for air gap sensing in the tunable Fabry–Pérot filter

We fabricate a microelectromechanical systems (MEMS)-based device configuring the tunable air gap Fabry–Pérot filter (FPF) with a static gradient thickness filter on the same platform. The proposed double filter configuration offers a wavelength calibration approach that accurately estimates the air...

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Veröffentlicht in:AIP advances 2024-07, Vol.14 (7), p.075006-075006-6
Hauptverfasser: Sahani, Pratyasha, Nabana, Shiori, Okatani, Taiyu, Inomata, Naoki, Kanamori, Yoshiaki
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Sprache:eng
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Zusammenfassung:We fabricate a microelectromechanical systems (MEMS)-based device configuring the tunable air gap Fabry–Pérot filter (FPF) with a static gradient thickness filter on the same platform. The proposed double filter configuration offers a wavelength calibration approach that accurately estimates the air gap dimension in the tunable air gap FPF. The wavelength calibration is performed by utilizing the spectrally-selective and spatially-resolved transmission characteristics of the tunable air gap FPF and the static gradient thickness filter, respectively. The MEMS-compatible chip-level integration of the static gradient thickness filter facilitates device miniaturization to enable its use in handheld devices.
ISSN:2158-3226
2158-3226
DOI:10.1063/5.0214684