COMPENSATION OF MEASUREMENT ERRORS WHEN REDUCING LINEAR DIMENSIONS OF THE KELVIN PROBE

The study is based on results of modeling of measurement circuit containing vibrating-plate capacitor using a complex-harmonic analysis technique. Low value of normalized frequency of small-sized scanning Kelvin probe leads to high distortion factor of probe’s measurement signal that in turn leads to high measurement errors. The way to lower measurement errors is to register measurement signal on its second harmonic and to control the probe-to-sample gap by monitoring the ratio between the second and the first harmonics’ amplitudes.