Epitaxial growth of inch-scale single-crystal transition metal dichalcogenides through the patching of unidirectionally orientated ribbons

Two-dimensional (2D) semiconductors, especially transition metal dichalcogenides (TMDs), have been envisioned as promising candidates in extending Moore’s law. To achieve this, the controllable growth of wafer-scale TMDs single crystals or periodic single-crystal patterns are fundamental issues. Her...

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Veröffentlicht in:Nature communications 2022-06, Vol.13 (1), p.3238-3238, Article 3238
Hauptverfasser: Yang, Pengfei, Wang, Dashuai, Zhao, Xiaoxu, Quan, Wenzhi, Jiang, Qi, Li, Xuan, Tang, Bin, Hu, Jingyi, Zhu, Lijie, Pan, Shuangyuan, Shi, Yuping, Huan, Yahuan, Cui, Fangfang, Qiao, Shan, Chen, Qing, Liu, Zheng, Zou, Xiaolong, Zhang, Yanfeng
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Sprache:eng
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Zusammenfassung:Two-dimensional (2D) semiconductors, especially transition metal dichalcogenides (TMDs), have been envisioned as promising candidates in extending Moore’s law. To achieve this, the controllable growth of wafer-scale TMDs single crystals or periodic single-crystal patterns are fundamental issues. Herein, we present a universal route for synthesizing arrays of unidirectionally orientated monolayer TMDs ribbons (e.g., MoS 2 , WS 2 , MoSe 2 , WSe 2 , MoS x Se 2-x ), by using the step edges of high-miller-index Au facets as templates. Density functional theory calculations regarding the growth kinetics of specific edges have been performed to reveal the morphological transition from triangular domains to patterned ribbons. More intriguingly, we find that, the uniformly aligned TMDs ribbons can merge into single-crystal films through a one-dimensional edge epitaxial growth mode. This work hereby puts forward an alternative pathway for the direct synthesis of inch-scale uniform monolayer TMDs single-crystals or patterned ribbons, which should promote their applications as channel materials in high-performance electronics or other fields. Here, the authors report the direct growth of periodic arrays of 2D semiconductor ribbons by exploiting the step edges of high-miller-index Au facets, showing potential for 2D electronic devices. The synthesized ribbons could also be merged to obtain wafer-scale single-crystal monolayers.
ISSN:2041-1723
2041-1723
DOI:10.1038/s41467-022-30900-9