ZrB2/SiCN Thin-Film Strain Gauges for In-Situ Strain Detection of Hot Components

The in-situ strain/stress detection of hot components in harsh environments remains a challenging task. In this study, ZrB2/SiCN thin-film strain gauges were fabricated on alumina substrates by direct writing. The effects of ZrB2 content on the electrical conductivity and strain sensitivity of ZrB2/SiCN composites were investigated, and based on these, thin film strain gauges with high electrical conductivity (1.71 S/cm) and a gauge factor of 4.8 were prepared. ZrB2/SiCN thin-film strain gauges exhibit excellent static, cyclic strain responses and resistance stability at room temperature. In order to verify the high temperature performance of the ZrB2/SiCN thin-film strain gauges, the temperature-resistance characteristic curves test, high temperature resistance stability test and cyclic strain test were conducted from 25 °C to 600 °C. ZrB2/SiCN thin-film strain gauges exhibit good resistance repeatability and stability, and highly sensitive strain response, from 25 °C to 600 °C. Therefore, ZrB2/SiCN thin-film strain gauges provide an effective approach for the measurement of in-situ strain of hot components in harsh environments.