Silicon-Based TM0-to-TM3 Mode-Order Converter Using On-Chip Shallowly Etched Slot Metasurface

Mode-order converters drive the on-chip applications of multimode silicon photonics. Here, we propose a TM0-to-TM3 mode-order converter by leveraging a shallowly etched slot metasurface pattern atop the silicon waveguide, rather than as some previously reported TE-polarized ones. With a shallowly etched pattern on the silicon waveguide, the whole waveguide refractive index distribution and the corresponding field evolution will be changed. Through further analyses, we have found the required slot metasurface pattern for generating the TM3 mode with high conversion efficiency of 92.9% and low modal crosstalk