A Review of MEMS Capacitive Microphones

A Review of MEMS Capacitive Microphones

This review collates around 100 papers that developed micro-electro-mechanical system (MEMS) capacitive microphones. As far as we know, this is the first comprehensive archive from academia on this versatile device from 1989 to 2019. These works are tabulated in term of intended application, fabrica...

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Veröffentlicht in:Micromachines (Basel) 2020-05, Vol.11 (5), p.484
Hauptverfasser: Zawawi, Siti Aisyah, Hamzah, Azrul Azlan, Majlis, Burhanuddin Yeop, Mohd-Yasin, Faisal
Format: Artikel
Sprache:eng
Schlagworte:
acoustic sensor
capacitive microphone
condenser microphone
evolution
micro-electro-mechanical system (MEMS)
Review
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Beschreibung
Zusammenfassung:This review collates around 100 papers that developed micro-electro-mechanical system (MEMS) capacitive microphones. As far as we know, this is the first comprehensive archive from academia on this versatile device from 1989 to 2019. These works are tabulated in term of intended application, fabrication method, material, dimension, and performances. This is followed by discussions on diaphragm, backplate and chamber, and performance parameters. This review is beneficial for those who are interested with the evolutions of this acoustic sensor.
ISSN:2072-666X
2072-666X
DOI:10.3390/mi11050484