A new Kirkpatrick–Baez‐based scanning microscope for the Submicron Resolution X‐ray Spectroscopy (SRX) beamline at NSLS‐II

The development, construction, and first commissioning results of a new scanning microscope installed at the 5‐ID Submicron Resolution X‐ray Spectroscopy (SRX) beamline at NSLS‐II are reported. The developed system utilizes Kirkpatrick–Baez mirrors for X‐ray focusing. The instrument is designed to enable spectromicroscopy measurements in 2D and 3D with sub‐200 nm spatial resolution. The present paper focuses on the design aspects, optical considerations, and specifics of the sample scanning stage, summarizing some of the initial commissioning results. The development and initial commissioning of a new Kirkpatrick–Baez‐based scanning microscope installed at the Submicron Resolution X‐ray Spectroscopy beamline at NSLS‐II are reported.