Effects of Deposition Pressure on the Microstructure,Mechanical Behavior and High-Temperature Oxidation Resistance of AlCrTiSiN Coatings

Deposition pressure is an important process parameter for coating preparation. To study its influence on the microstructure, mechanical properties and high-temperature oxidation resistance of AlCrTiSiN nanocomposite coatings, two types of AlCrTiSiN nanocomposite coatings were prepared using RF magnetron sputtering and pulse DC magnetron sputtering composite technologies at different deposition pressures(0.6, 0.8 Pa). Comparative analyses of the structure and properties of two types of coatings were performed using X-ray diffractometer(XRD), scanning electron microscope(SEM) equipped with an energy dispersive spectrometer(EDS) and nanoindenter. Results showed that the phase structure of the coatings prepared under two kinds of deposition pressures was fcc-(Al, Cr, Ti) N, which grew preferentially along the(111) crystal plane. However, the larger(111) texture coefficient of the coating prepared at 0.8 Pa indicated that the preferred orientation was more pronounced. Compared to the coating prepared at the deposi