Conductance Tunable Suspended Graphene Nanomesh by Helium Ion Beam Milling

This paper demonstrates that the electrical properties of suspended graphene nanomesh (GNM) can be tuned by systematically changing the porosity with helium ion beam milling (HIBM). The porosity of the GNM is well-controlled by defining the pitch of the periodic nanopores. The defective region surrounding the individual nanopores after HIBM, which limits the minimum pitch achievable between nanopores for a certain dose, is investigated and reported. The exponential relationship between the thermal activation energy ( ) and the porosity is found in the GNM devices. Good tuneability observed from the GNMs provides a new approach to the transport gap engineering beyond the conventional nanoribbon method.