CMOS-integrated film bulk acoustic resonators for label-free biosensing

The throughput is an important parameter for label-free biosensors. Acoustic resonators like the quartz crystal microbalance have a low throughput because the number of sensors which can be used at the same time is limited. Here we present an array of 64 CMOS-integrated film bulk acoustic resonators...

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Veröffentlicht in:	Sensors (Basel, Switzerland) Switzerland), 2010-05, Vol.10 (5), p.4180-4193
Hauptverfasser:	Nirschl, Martin, Rantala, Arto, Tukkiniemi, Kari, Auer, Sanna, Hellgren, Ann-Charlotte, Pitzer, Dana, Schreiter, Matthias, Vikholm-Lundin, Inger
Format:	Artikel
Sprache:	eng
Schlagworte:	Acoustics Acoustics - instrumentation Animals biomolecular interaction analysis Biosensing Techniques - instrumentation biosensor Biosensors Buffers Calcitonin - genetics Cattle CMOS Cyclooxygenase 2 - genetics Digital signal processors DNA DNA - analysis Electronic mail systems FBAR film bulk acoustic resonator Gold label-free Limit of Detection Metals - chemistry Microscopy, Electron, Scanning Oxides - chemistry Polymerase Chain Reaction Protein Precursors - genetics Quartz Crystal Microbalance Techniques Semiconductors Sensors Serum Serum Albumin, Bovine - analysis Staining and Labeling Surface Plasmon Resonance thickness shear mode TSM
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Beschreibung
Zusammenfassung:	The throughput is an important parameter for label-free biosensors. Acoustic resonators like the quartz crystal microbalance have a low throughput because the number of sensors which can be used at the same time is limited. Here we present an array of 64 CMOS-integrated film bulk acoustic resonators. We compare the performance with surface plasmon resonance and the quartz crystal microbalance and demonstrate the performance of the sensor for multiplexed detection of DNA.
ISSN:	1424-8220 1424-8220
DOI:	10.3390/s100504180