Compositional Analysis of SiOC(H) Powders: A Comparison of X-ray Photoelectron Spectroscopy (XPS) and Combustion Analysis

Accurate chemical analysis of small samples of fine powders in the Si–O–C–H system is challenging. We present a comparison of analysis by X-ray photoelectron spectroscopy (XPS) and combustion analysis, validating XPS as an accurate and simple methodology for Si, C, and O analysis to give bulk and not just surface compositions. The XPS analyses are supported by showing consistency in thermochemical calculations of heats of formation based on high temperature oxide melt solution calorimetry. However, because XPS is not suitable for quantitation of hydrogen, it must be combined with other techniques for samples with substantial H content.