Displacement measuring interferometer for sub-nano meter resolution

Displacement measuring interferometer for sub-nano meter resolution

In this presentation, the displacement measurement system using sinusoidal phase modulation interferometer and modified phase-locked loop is discussed. The modified phase-locked loop is specially developed phase-locked loop for sinusoidal phase modulation interferometer for improving the resolution....

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Veröffentlicht in:Measurement. Sensors 2021-12, Vol.18, p.100336, Article 100336
Hauptverfasser: Higuchi, Masato, Wei, Dong, Aketagawa, Masato
Format: Artikel
Sprache:eng
Schlagworte:
Displacement measurement
Phase meter
Phase-locked loop
Pico meter
Sinusoidal modulation
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Beschreibung
Zusammenfassung:In this presentation, the displacement measurement system using sinusoidal phase modulation interferometer and modified phase-locked loop is discussed. The modified phase-locked loop is specially developed phase-locked loop for sinusoidal phase modulation interferometer for improving the resolution. The 0.1 nm step displacement with 1 Hz results that the current resolution of the system is less than sub-nano meter order.
ISSN:2665-9174
2665-9174
DOI:10.1016/j.measen.2021.100336