Modeling of Kr-Xe discharge of excimer lamp

Modeling of Kr-Xe discharge of excimer lamp

This paper reports the numerical simulation of Dielectric Barrier Discharge (DBD) for Kr-Xe excilamp. The model of the discharge consists of three main modules: a plasma chemistry module, a circuit module and a Boltzmann equation module. The results predict the optimal operating conditions and descr...

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Veröffentlicht in:EPJ Web of conferences 2013, Vol.44, p.4004-04004
Hauptverfasser: Bendella, S., Larouci, B., Belasri, A.
Format: Artikel
Sprache:eng
Schlagworte:
Circuits
Dielectric barrier discharge
Excimers
Lamps
Mathematical analysis
Mathematical models
Modules
Optimization
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Beschreibung
Zusammenfassung:This paper reports the numerical simulation of Dielectric Barrier Discharge (DBD) for Kr-Xe excilamp. The model of the discharge consists of three main modules: a plasma chemistry module, a circuit module and a Boltzmann equation module. The results predict the optimal operating conditions and describe the electrical and chemical properties of the KrXe* excimer lamp.
ISSN:2100-014X
2100-014X
DOI:10.1051/epjconf/20134404004