STRUCTURE OF THE INFORMATION AND MEASUREMENT CONTROL SYSTEM FOR THE SYNTHESIS OF TRANSPARENT CONDUCTIVE OXIDES

Background. The object of the study is an information-measuring and control system for the synthesis of transparent conductive oxides by spray pyrolysis. The subject of the study is the structure of the specified informationmeasuring and control system. The aim of the work is to increase the controllability of the synthesis of transparent conductive oxides by spray pyrolysis, which is achieved through the development of an improved information and measurement control system for the synthesis of transparent conductive oxides, its hardware and software. Materials and methods. The block diagram of the information-measuring and control system for the synthesis of transparent conductive oxides contains hardware and software parts. In particular, the hardware part consists of blocks necessary for the implementation and control of the spray pyrolysis process, channels for measuring the temperature of the substrate (based on the use of a thermocouple) and electrophysical parameters of synthesized transparent conductive oxides (based on the four-probe method). Results. The structure of the information-measuring and control system for the synthesis of transparent conductive oxides has been developed. Studies of the surface resistance of transparent conductive oxides have been carried out. The structure of the channel for measuring the temperature of the substrate during the spray pyrolysis process has been developed. Conclusions. The developed structure of the information-measuring control system for the synthesis of transparent conductive oxides allows us to solve the following tasks: to select the optimal technological parameters of the coatings being formed; to perform the synthesis of coatings by controlling the technological process; to measure the temperature and electrophysical parameters of transparent conductive coatings.