Development Status of Key Technologies for Optoelectronic Integrated Circuit Manufacturing

Development Status of Key Technologies for Optoelectronic Integrated Circuit Manufacturing

Optoelectronic integrated circuit (OEIC) technology has attracted considerable research attention. Studies have achieved numerous breakthroughs in the basic scientific problems, key technologies, demonstration applications, and industrial promotions of OEIC. This study details the technical process,...

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Veröffentlicht in:Applied sciences 2024-09, Vol.14 (17), p.8073
Hauptverfasser: Liang, Mengjie, Fang, Ji, Chen, Dunkui, Chen, Lang, Peng, Lingling, Zhang, Chi, Chen, Yingchun, Lu, Xiang
Format: Artikel
Sprache:eng
Schlagworte:
Chemical vapor deposition
CMOS
design
encapsulation
Energy consumption
Etching
integrate
Integrated circuits
Ion implantation
Lasers
Light emitting diodes
manufacture
Manufacturing
optical interconnection
optoelectronic integrated circuit (OEIC)
Organic chemicals
Receivers & amplifiers
Semiconductors
Silica
Silicon nitride
Silicon wafers
Software
Transistors
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Zusammenfassung:Optoelectronic integrated circuit (OEIC) technology has attracted considerable research attention. Studies have achieved numerous breakthroughs in the basic scientific problems, key technologies, demonstration applications, and industrial promotions of OEIC. This study details the technical process, development status, existing problems, and future research trends of the design, manufacturing, and packaging of OEIC to provide a systematic summary of OEIC technology.
ISSN:2076-3417
2076-3417
DOI:10.3390/app14178073