Uncertainty analysis for dynamic properties of MEMS resonator supported by fuzzy arithmetics

In the paper the application of uncertainty analysis performed for microelectromechanical resonator is presented. Main objective of undertaken analysis is to assess the propagation of considered uncertainties in the variation of chosen dynamic characteristics of Finite Element model of microresonator. Many different model parameters have been assumed to be uncertain: geometry and material properties. Apart from total uncertainty propagation, sensitivity analysis has been carried out to study separate influences of all input uncertain characteristics. Uncertainty analysis has been performed by means of fuzzy arithmetics in which alpha-cut strategy has been applied to assemble output fuzzy number. Monte Cario Simulation and Genetic Algorithms have been employed to calculate intervals connected with each alpha-cut of searched fuzzy number. Elaborated model of microresonator has taken into account in a simplified way the presence of surrounding air and constant electrostatic field.