Technology of obtaining fine textured films for femtosecond instrumentation based on photon echo

Technology of obtaining fine textured films for femtosecond instrumentation based on photon echo

This paper presents the technological approaches to the creation of thin textured films by the method of magnetron sputtering with parameters ensuring excitation of detected photon echo signals in them and the adjusted metrological characteristics of devices on a photon echo.

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Bibliographische Detailangaben
Hauptverfasser: Belyaev, R.W., Bakhadurov, A.U., Vashourin, N.S., Gazizov, K.Sh, Musanov, A.N., Nikitin, D.A., Popov, I.I., Moroz, A.V., Stepanov, S.A., Sushentsov, N.I.
Format: Tagungsbericht
Sprache:eng
Schlagworte:
Magnetron sputtering
Thin films
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Beschreibung
Zusammenfassung:This paper presents the technological approaches to the creation of thin textured films by the method of magnetron sputtering with parameters ensuring excitation of detected photon echo signals in them and the adjusted metrological characteristics of devices on a photon echo.
ISSN:2100-014X
2101-6275
2100-014X
DOI:10.1051/epjconf/201716103006