Piezoelectric Analysis of Saw Sensor Using Finite Element Method

Piezoelectric Analysis of Saw Sensor Using Finite Element Method

In this contribution modeling and simulation of surface acoustic waves (SAW) sensor using finite element method will be presented. SAW sensor is made from piezoelectric GaN layer and SiC substrate. Two different analysis types are investigated - modal and transient. Both analyses are only 2D. The go...

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Veröffentlicht in:Sborník vědeckých prací Vysoké školy báňské--Technické univerzity Ostrava. Řada strojní 2013-06, Vol.59 (1), p.33-38
Hauptverfasser: Kutiš, Vladimír, Gálik, Gabriel, Rýger, Ivan, Murín, Justin, Hrabovský, Juraj, Paulech, Juraj, Lalinský, Tibor
Format: Artikel
Sprache:eng
Schlagworte:
FEM analysis
MEMS
modal analysis
piezoelectric material
SAW sensor
transient analysis
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Beschreibung
Zusammenfassung:In this contribution modeling and simulation of surface acoustic waves (SAW) sensor using finite element method will be presented. SAW sensor is made from piezoelectric GaN layer and SiC substrate. Two different analysis types are investigated - modal and transient. Both analyses are only 2D. The goal of modal analysis, is to determine the eigenfrequency of SAW, which is used in following transient analysis. In transient analysis, wave propagation in SAW sensor is investigated. Both analyses were performed using FEM code ANSYS.
ISSN:1210-0471
1804-0993
DOI:10.22223/tr.2013-1/1932