Sol-gel synthesis of barium titanate films and prospectives of their application

The sol-gel method of fabrication strontium titanate films is described. The films were characterized with scanning electron microscopy, X-ray diffraction analysis and ellipsometry. It is shown, that one layer of barium titanate films are amorphous, whereas multilayer films reveal Bragg diffraction peaks corresponding to BaTiO3 phase after annealing at 850оС. The perspective of fabrication the proposed sol for the thin film capacitive structures as well as multilayer interference filters of optical range is discussed.