Data set for "Evolution of Au nanoparticles in c-plane GaN under the heavy ion implantation and their optical properties "

The modification of GaN with Au nanoparticles is a promising way for manipulating optical properties in optoelectronics and enhancing the sensitivity of GaN-based substrates used in Surface Enhanced Raman Spectroscopy. Ion implantation is an attractive method for the preparation of high-purity metal nanoparticles on the surface or within the bulk of solids, although this process in crystals is not yet fully understood. Here we study the specific stages of Au nanoparticle formation in c-plane GaN crystals implanted with 1.85 MeV Au ions to the fluence range of 1.5×1016, 3×1016, 5×1016 and 7×1016 cm-2. The implanted samples were annealed at 800 °C in an ammonia atmosphere for 20 minutes. The structural and optical properties of the samples were investigated by a combination of Rutherford backscattering spectroscopy in channeling mode (RBS-C), Transmission Electron Microscopy (TEM), Raman spectroscopy, photoluminescence (PL) and diffuse-reflectance spectroscopy (DRS). Rutherford backscattering spectrometry was carried out in the channeling regime (RBS-C) using the 2.8 MeV He ion beam and cumulated charge of 1.69 μC. The collected spectra were used also for calculation of displacement depth profiles. Raman spectra were obtained by the inVia Raman microscope (Renishaw, England) in backscattering geometry with a CCD detector and a DPSS laser (532 nm, 50 mW) with an applied power of 2,5 mW and a 50× magnification objective. High-resolution transmission electron microscopy (HRTEM) and scanning transmission electron microscopy (STEM)and Brieght Field TEM (BF-TEM) images were captured by Fei Tecnai F20 field emission gun transmission electron microscope operated at 200 kV. PL spectroscopy measurements were carried out at 10 K by employing a closed-cycle He refrigerator system and using a 325 nm wavelength He–Cd laser as an excitation source (power density ∼10 W cm-2). The PL spectra were recorded by fiber-optic spectrometers (Ocean Optics HR4000/USB4000). DRS was measured at room temperature (RT) by EVO-600 (Thermo Fisher Scientific, Inc.) UV–Vis spectrophotometer.