Full dataset of the article: Robust local thickness estimation of sub-micrometer specimen by 4D-STEM

Datasets were taken for q4STEM method evaluation (quantitative 4D STEM). It enables in-situ local thickness estimation of amorphous electron transparent samples such as lamellas used in TEM tomography. They are named by the used detector (direct detection STEM; ligth conversion STEM) and the sample...

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Hauptverfasser: Skoupý, Radim, Boltje, Daan
Format: Dataset
Sprache:eng
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Zusammenfassung:Datasets were taken for q4STEM method evaluation (quantitative 4D STEM). It enables in-situ local thickness estimation of amorphous electron transparent samples such as lamellas used in TEM tomography. They are named by the used detector (direct detection STEM; ligth conversion STEM) and the sample (ultrathin section of lung tissue; latex beads; FIB milled stepped lamella - epoxy resin).
DOI:10.4121/21365268