Squared PMUT with enhanced pressure sensitivities

This study presents a squared AlN piezoelectric micromachined ultrasonic transducer (PMUT). Using this PMUT greater level of output pressure and higher reception sensitivity has been achieved, compared with the state-of-the-art. Another outstanding characteristic for this PMUT is that it can be mono...

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Hauptverfasser:	Ledesma, Eyglis, Zamora, Iván, Torres, Francesc, Uranga del Monte, Aránzazu, Tzanov, Vassil, Barniol i Beumala, Núria, Marigó Ferrer, Eloi, Soundara-Pandian, Mohan
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Sprache:	eng
Schlagworte:	Piezoelectric micromachined ultrasonic transducer (PMUT) Differential excitation Receiving sensitivity Transmitting sensitivity
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creator	Ledesma, Eyglis Zamora, Iván Torres, Francesc Uranga del Monte, Aránzazu Tzanov, Vassil Barniol i Beumala, Núria Marigó Ferrer, Eloi Soundara-Pandian, Mohan
description	This study presents a squared AlN piezoelectric micromachined ultrasonic transducer (PMUT). Using this PMUT greater level of output pressure and higher reception sensitivity has been achieved, compared with the state-of-the-art. Another outstanding characteristic for this PMUT is that it can be monolithically integrated on CMOS substrate, being remarkably advantageous in relation to the bonding method implemented until now.
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subjects	Piezoelectric micromachined ultrasonic transducer (PMUT) Differential excitation Receiving sensitivity Transmitting sensitivity
title	Squared PMUT with enhanced pressure sensitivities
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