Squared PMUT with enhanced pressure sensitivities

Squared PMUT with enhanced pressure sensitivities

This study presents a squared AlN piezoelectric micromachined ultrasonic transducer (PMUT). Using this PMUT greater level of output pressure and higher reception sensitivity has been achieved, compared with the state-of-the-art. Another outstanding characteristic for this PMUT is that it can be mono...

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Bibliographische Detailangaben
Hauptverfasser: Ledesma, Eyglis, Zamora, Iván, Torres, Francesc, Uranga del Monte, Aránzazu, Tzanov, Vassil, Barniol i Beumala, Núria, Marigó Ferrer, Eloi, Soundara-Pandian, Mohan
Format: Artikel
Sprache:eng
Schlagworte:
Piezoelectric micromachined ultrasonic transducer (PMUT) Differential excitation
Receiving sensitivity
Transmitting sensitivity
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Beschreibung
Zusammenfassung:This study presents a squared AlN piezoelectric micromachined ultrasonic transducer (PMUT). Using this PMUT greater level of output pressure and higher reception sensitivity has been achieved, compared with the state-of-the-art. Another outstanding characteristic for this PMUT is that it can be monolithically integrated on CMOS substrate, being remarkably advantageous in relation to the bonding method implemented until now.