Optical loss analysis and parameter optimization for fan-shaped single-polarization grating coupler at wavelength of 1.3 µm band

Fan-shaped grating couplers (F-GCs) can be smaller than straight ones but are less efficient in general in coupling to single-mode fibers. To find a small F-GC with sufficiently high fiber-coupling characteristics, we numerically compared the dependencies of coupling efficiencies on wavelengths, the starting width of gratings, and misalignment distances among 25, 45, and 60° tapered angles of fan shape by using the three-dimensional finite-difference time domain method. A F-GC with a tapered angle of 25° exhibited the highest performances for all dependencies. The optical loss origins of F-GCs were discussed in terms of the electric field structures in them and scattering at the joint between the fan-shaped slab and channel waveguide. We fabricated an optimized 25° F-GC by using ArF photolithography, which almost exactly reproduced the optical coupling efficiency and radiation angle characteristics that were numerically expected.